Inventor
VOPAT ROBERT B
US15 patents
⚠️ This page may combine multiple inventors who share the name “VOPAT ROBERT B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
11 patentsUS10256125B2Apr 9, 2019
Wafer processing systems including multi-position batch load lock apparatus with temperature control capability
APPLIED MATERIALS INC14 citations93
US9378994B2Jun 28, 2016
Multi-position batch load lock apparatus and systems and methods including same
APPLIED MATERIALS INC19 citations92
US9281222B2Mar 8, 2016
Wafer handling systems and methods
APPLIED MATERIALS INC23 citations91
US10586720B2Mar 10, 2020
Wafer processing systems including multi-position batch load lock apparatus with temperature control capability
APPLIED MATERIALS INC12 citations85
US10427303B2Oct 1, 2019
Substrate deposition systems, robot transfer apparatus, and methods for electronic device manufacturing
APPLIED MATERIALS INC17 citations84
US11094504B2Aug 17, 2021
Resonator coil having an asymmetrical profile
APPLIED MATERIALS INC2 citations72
US12185451B2Dec 31, 2024
Resonator, linear accelerator, and ion implanter having dielectric-free resonator chamber
APPLIED MATERIALS INC0 citations62
US11985756B2May 14, 2024
Linear accelerator coil including multiple fluid channels
APPLIED MATERIALS INC0 citations62
US11710617B2Jul 25, 2023
Resonator coil having an asymmetrical profile
APPLIED MATERIALS INC0 citations62
US12279359B2Apr 15, 2025
Linear accelerator assembly including flexible high-voltage connection
APPLIED MATERIALS INC0 citations61
US11895766B2Feb 6, 2024
Linear accelerator assembly including flexible high-voltage connection
APPLIED MATERIALS INC0 citations61