Inventor
DANIEL JR MALCOLM N
US6 patents
⚠️ This page may combine multiple inventors who share the name “DANIEL JR MALCOLM N”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS10256125B2Apr 9, 2019
Wafer processing systems including multi-position batch load lock apparatus with temperature control capability
APPLIED MATERIALS INC14 citations93
US9378994B2Jun 28, 2016
Multi-position batch load lock apparatus and systems and methods including same
APPLIED MATERIALS INC19 citations92
US9281222B2Mar 8, 2016
Wafer handling systems and methods
APPLIED MATERIALS INC23 citations91
US10586720B2Mar 10, 2020
Wafer processing systems including multi-position batch load lock apparatus with temperature control capability
APPLIED MATERIALS INC12 citations85
US10427303B2Oct 1, 2019
Substrate deposition systems, robot transfer apparatus, and methods for electronic device manufacturing
APPLIED MATERIALS INC17 citations84