P

Inventor

KIM JEONGGIL

KR23 patents
⚠️ This page may combine multiple inventors who share the name “KIM JEONGGIL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

12 patents
US11599031B2Mar 7, 2023

Target debris collection device and extreme ultraviolet light source apparatus including the same

SAMSUNG ELECTRONICS CO LTD1 citations72
US11231656B2Jan 25, 2022

Target debris collection device and extreme ultraviolet light source apparatus including the same

SAMSUNG ELECTRONICS CO LTD2 citations72
US11852984B2Dec 26, 2023

Target debris collection device and extreme ultraviolet light source apparatus including the same

SAMSUNG ELECTRONICS CO LTD0 citations62
US11454882B2Sep 27, 2022

Pellicle for reflective mask

SAMSUNG ELECTRONICS CO LTD0 citations62
US11711883B2Jul 25, 2023

Droplet accelerating assembly and extreme ultra-violet lithography apparatus including the same

SAMSUNG ELECTRONICS CO LTD1 citations61
US11048179B2Jun 29, 2021

Apparatus for removing residues from source vessel

SAMSUNG ELECTRONICS CO LTD1 citations61
US11822260B2Nov 21, 2023

Apparatus for removing residue of EUV light source vessel

SAMSUNG ELECTRONICS CO LTD0 citations60
US11698590B2Jul 11, 2023

Collector mirror and apparatus for creating extreme ultraviolet light including the same

SAMSUNG ELECTRONICS CO LTD0 citations57
US12487532B2Dec 2, 2025

EUV collector inspection apparatus and inspection method

SAMSUNG ELECTRONICS CO LTD0 citations55
US12298676B2May 13, 2025

Substrate processing apparatus

SAMSUNG ELECTRONICS CO LTD0 citations44
US11720027B2Aug 8, 2023

Apparatus for generating extreme ultraviolet light and lithography apparatus including the same

SAMSUNG ELECTRONICS CO LTD0 citations43
US12298671B2May 13, 2025

Illumination correction apparatus

SAMSUNG ELECTRONICS CO LTD0 citations39

LG ELECTRONICS INC

8 patents

LG ENERGY SOLUTION LTD

2 patents

LG CHEMICAL LTD

1 patent