Inventor
LACOMBAT MICHEL
FR17 patents
⚠️ This page may combine multiple inventors who share the name “LACOMBAT MICHEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
THOMSON CSF
16 patentsUS4370026AJan 25, 1983
Illuminating device for providing an illumination beam with adjustable distribution of intensity and a pattern-transfer system comprising such a device
THOMSON CSF103 citations94
US4402610ASep 6, 1983
Optical system for the automatic alignment of two motifs comprising alignment marks of the grating type, particularly in direct photorepetition on silicon
THOMSON CSF32 citations92
US4371264AFeb 1, 1983
Optical system for aligning two patterns and photo-repeater using such a system
THOMSON CSF34 citations91
US4155642AMay 22, 1979
Mask photorepeater apparatus
THOMSON CSF22 citations82
US4373774AFeb 15, 1983
Illuminator for supplying a divergent illuminating beam from a predetermined area of a plane
THOMSON CSF23 citations80
US4226569AOct 7, 1980
Wafer loading and positioning device
THOMSON CSF27 citations80
US4171162AOct 16, 1979
System for positioning an object in an optical projection system
THOMSON CSF28 citations80
US4140392AFeb 20, 1979
Optical system for projecting patterns comprising a constant-magnification focusing servocontrol
THOMSON CSF21 citations80
US4295735AOct 20, 1981
Optical projection system having a photorepetition function
THOMSON CSF20 citations79
US4329056AMay 11, 1982
Optical fiber interferometric rate gyro particularly adapted to the measurement of low rotational speeds
THOMSON CSF14 citations74
US4367046AJan 4, 1983
Optical system for aligning two patterns and a photorepeater embodying such a system
THOMSON CSF17 citations73
US4375315AMar 1, 1983
Arc lamp illuminator
THOMSON CSF12 citations72
US4373814AFeb 15, 1983
Compact optical coupling device and optical-fiber interferometer gyrometer comprising such a device
THOMSON CSF8 citations72
US4172656AOct 30, 1979
Method of positioning a thin semiconductor plate and patterns to be projected thereon in a photorepeater and a photorepeater for carrying out this method
THOMSON CSF8 citations68
US4239381ADec 16, 1980
Optical projection system equipped with a plate positioner
THOMSON CSF6 citations57
US4221487ASep 9, 1980
System for testing a pattern recorded on a plate
THOMSON CSF2 citations53