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Inventor
SATOH SABUROH
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “SATOH SABUROH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AGENCY IND SCIENCE TECHN
1 patent
US5454347A
Oct 3, 1995
Laser-beam annealing apparatus
AGENCY IND SCIENCE TECHN
58 citations
92
TOKYO SHIBAURA ELECTRIC CO
1 patent
US4507266A
Mar 26, 1985
Glow discharge generating apparatus
TOKYO SHIBAURA ELECTRIC CO
20 citations
77
HAYASHI NOBUYA
1 patent
US8535615B2
Sep 17, 2013
Radical sterilization apparatus
HAYASHI NOBUYA
1 citations
44