Inventor
WAKAYAMA SHIGERU
JP5 patents
Patents
5 patentsUS5929452AJul 27, 1999
Electrostatic deflecting electrode unit for use in charged beam lithography apparatus and method of manufacture the same
TOSHIBA KK17 citations81
US5006374AApr 9, 1991
Method of forming thin organic films
TOSHIBA KK7 citations72
US4987851AJan 29, 1991
Apparatus for forming organic thin film
TOSHIBA KK18 citations72
US4848270AJul 18, 1989
Method and apparatus for forming thin organic film
TOSHIBA KK4 citations61
US7745203B2Jun 29, 2010
Base sequence detection apparatus and base sequence automatic analyzing apparatus
TOSHIBA KK6 citations59