Inventor
ANZE HIROHITO
JP10 patents
⚠️ This page may combine multiple inventors who share the name “ANZE HIROHITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
4 patentsUS5863682AJan 26, 1999
Charged particle beam writing method for determining optimal exposure dose prior to pattern drawing
TOSHIBA KK107 citations96
US6313476B1Nov 6, 2001
Charged beam lithography system
TOSHIBA KK56 citations95
US5885747AMar 23, 1999
Charged beam lithography method
TOSHIBA KK63 citations95
US6346354B1Feb 12, 2002
Pattern writing method
TOSHIBA KK12 citations73
NUFLARE TECHNOLOGY INC
4 patentsUS9147552B2Sep 29, 2015
Charged particle beam writing method and charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC7 citations79
US9581893B2Feb 28, 2017
Mask manufacturing method, mask substrate, and charged beam drawing method
NUFLARE TECHNOLOGY INC0 citations50
US10256073B2Apr 9, 2019
Charged particle beam writing method
NUFLARE TECHNOLOGY INC0 citations40
US9633820B2Apr 25, 2017
Method for forming resist film and charged particle beam writing method
NUFLARE TECHNOLOGY INC0 citations40