Inventor
YANG MING-CHENG
TW11 patents
⚠️ This page may combine multiple inventors who share the name “YANG MING-CHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
PROMOS TECHNOLOGIES INC
6 patentsUS6632742B2Oct 14, 2003
Method for avoiding defects produced in the CMP process
PROMOS TECHNOLOGIES INC57 citations95
US6153116ANov 28, 2000
Method of detecting end point and monitoring uniformity in chemical-mechanical polishing operation
PROMOS TECHNOLOGIES INC96 citations95
US6749484B2Jun 15, 2004
Chemical mechanical polishing (CMP) apparatus with temperature control
PROMOS TECHNOLOGIES INC19 citations92
US6432728B1Aug 13, 2002
Method for integration optimization by chemical mechanical planarization end-pointing technique
PROMOS TECHNOLOGIES INC43 citations90
US6306022B1Oct 23, 2001
Chemical-mechanical polishing device
PROMOS TECHNOLOGIES INC8 citations65
US6514861B1Feb 4, 2003
Manufacturing a semiconductor wafer according to the process time by process tool
PROMOS TECHNOLOGIES INC11 citations62