Inventor
SASAKI HIROKO
JP7 patents
⚠️ This page may combine multiple inventors who share the name “SASAKI HIROKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
5 patentsUS9748104B2Aug 29, 2017
Method of depositing film
TOKYO ELECTRON LTD280 citations97
US9136133B2Sep 15, 2015
Method of depositing film
TOKYO ELECTRON LTD12 citations82
US10053776B2Aug 21, 2018
Method of detoxifying exhaust pipe and film forming apparatus
TOKYO ELECTRON LTD0 citations50
US8921237B2Dec 30, 2014
Method of depositing a film
TOKYO ELECTRON LTD0 citations50
US10472719B2Nov 12, 2019
Nozzle and substrate processing apparatus using same
TOKYO ELECTRON LTD0 citations39