Inventor
ONO MASANORI
JP14 patents
⚠️ This page may combine multiple inventors who share the name “ONO MASANORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
10 patentsUS6259592B1Jul 10, 2001
Apparatus for retaining a workpiece upon a workpiece support and method of manufacturing same
APPLIED MATERIALS INC79 citations95
US10460916B2Oct 29, 2019
Real time monitoring with closed loop chucking force control
APPLIED MATERIALS INC45 citations93
US6506290B1Jan 14, 2003
Sputtering apparatus with magnetron device
APPLIED MATERIALS INC25 citations92
US6095754AAug 1, 2000
Turbo-Molecular pump with metal matrix composite rotor and stator
APPLIED MATERIALS INC38 citations92
US11158526B2Oct 26, 2021
Temperature controlled substrate support assembly
APPLIED MATERIALS INC2 citations73
US10403534B2Sep 3, 2019
Pixilated cooling, temperature controlled substrate support assembly
APPLIED MATERIALS INC3 citations72
US9558981B2Jan 31, 2017
Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods
APPLIED MATERIALS INC4 citations72
US12243756B2Mar 4, 2025
Temperature controlled substrate support assembly
APPLIED MATERIALS INC0 citations62
US10121688B2Nov 6, 2018
Electrostatic chuck with external flow adjustments for improved temperature distribution
APPLIED MATERIALS INC1 citations51
US9875923B2Jan 23, 2018
Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods
APPLIED MATERIALS INC0 citations51