Inventor

GOODWIN ERIC PETER

US45 patents

⚠️ This page may combine multiple inventors who share the name “GOODWIN ERIC PETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GOODWIN ERIC PETER

NIKON CORP

Scan mirrors for laser radar

Color time domain integration camera having a single charge coupled device and fringe projection auto-focus system

Radar systems with dual fiber coupled lasers

Radar systems with dual fiber coupled lasers

Test of operational status of a digital scanner during lithographic exposure process

Autofocus system and method

System and method for a displacement measurement

Determination of operability of a digital scanner with shearing interferometry

Laser radar with remote local oscillator

Shearing interferometry measurement device for microscopy

Two axis encoder head assembly

Compact shearography system with adjustable shear distance

Systems and methods for improved melting in three-dimensional printing processes

Compensation for Goos-Hanchen error in autofocus systems

Measurement of melt pool position in additive manufacturing

Spatially filtered talbot interferometer for wafer distortion measurement

Systems and methods for measuring radiation emitted during a three-dimensional printing process

Metrology for additive manufacturing

System and method for a displacement measurement

Determination of operability of a digital scanner with shearing interferometry

Correction of errors caused by ambient non-uniformities in a fringe-projection autofocus system in absence of a reference mirror

Encoder head with a birefringent lens element and exposure system utilizing the same

Transparent-block encoder head with isotropic wedged elements

Correction of errors caused by ambient non-uniformities in a fringe-projection autofocus system in absence of a reference mirror

Compensation for Goos-Hanchen error in autofocus systems

Autofocus system and method

Minimization of Abbe error caused by tip or tilt between an encoder head and a wafer stage for arbitrary location of a center of rotation

Two-dimensional encoder system and method

Rules for reducing the sensitivity of fringe projection autofocus to air temperature changes

Apparatus and method for improving contrast detected in a fringe projection autofocus system

System and method for compensating instability in an autofocus system

Method for spatially multiplexing two or more fringe projection signals on a single detector

Array of encoders for alignment measurement

Encoder head with birefringent elements for forming imperfect retroreflection and exposure system utilizing the same

Interferometer devices for determining initial position of a stage or the like

Three-dimensional positioning system using surface pattern recognition and interpolation

GOODWIN ERIC PETER

Two dimensional encoder system and method

Optical assembly for laser radar

Apparatus, optical assembly, method for inspection or measurement of an object and method for manufacturing a structure

Measurement system and method utilizing high contrast encoder head for measuring relative movement between objects

High resolution encoder head

Light source assembly that generates heterodyne output beams

Custom color or polarization sensitive CCD for separating multiple signals in autofocus projection system

NIKON RES CORPORATION OF AMERICA

Optical system with a frustrated isotropic block

SMITH DANIEL GENE

Exposure apparatus with an illumination system generating multiple illumination beams