Inventor

SMITH DANIEL GENE

US37 patents

⚠️ This page may combine multiple inventors who share the name “SMITH DANIEL GENE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SMITH DANIEL GENE

NIKON CORP

Autofocus system with error compensation

Measurement of a change in a geometrical characteristic and/or position of a workpiece

Optical objective for operation in EUV spectral region

Optical assembly, method for producing data in the same, and method for manufacturing structure

Autofocus system and method

High-resolution position encoder with image sensor and encoded target pattern

Compact shearography system with adjustable shear distance

Optical assembly, method for producing data in the same, and method for manufacturing structure

Illumination system with curved 1d-patterned mask for use in EUV-exposure tool

Euv lithography system for dense line patterning

Illumination system with flat 1D-patterned mask for use in EUV-exposure tool

Compensation for Goos-Hanchen error in autofocus systems

EUV lithography system for dense line patterning

Extreme ultraviolet lithography system that utilizes pattern stitching

Extreme ultraviolet lithography system that utilizes pattern stitching

Eighth wave corner cube retarder for laser radar

Curved reticle by mechanical and phase bending along orthogonal axes

Spatially filtered talbot interferometer for wafer distortion measurement

Metrology for additive manufacturing

Correction of errors caused by ambient non-uniformities in a fringe-projection autofocus system in absence of a reference mirror

Illumination device for optimizing polarization in an illumination pupil

Correction of errors caused by ambient non-uniformities in a fringe-projection autofocus system in absence of a reference mirror

Compensation for Goos-Hanchen error in autofocus systems

Autofocus system and method

Illumination device for optimizing polarization in an illumination pupil

Two-dimensional encoder system and method

System and method for compensating instability in an autofocus system

Fast illumination simulator based on a calibrated flexible point-spread function

GOODWIN ERIC PETER

Two dimensional encoder system and method

Optical assembly for laser radar

Apparatus, optical assembly, method for inspection or measurement of an object and method for manufacturing a structure

Measurement system and method utilizing high contrast encoder head for measuring relative movement between objects

Custom color or polarization sensitive CCD for separating multiple signals in autofocus projection system

SMITH DANIEL GENE

Exposure apparatus with an illumination system generating multiple illumination beams

Compound parabolic collectors for projection lens metrology

Imaging optical system for producing control information regarding lateral movement of an image plane or an object plane

NIPPON KOGAKU KK

High order focus in laser radar tooling ball measurements