Inventor
TUNG JEN-CHIEH
TW3 patents
Patents
3 patentsUS6679765B2Jan 20, 2004
Slurry supply system disposed above the rotating platen of a chemical mechanical polishing apparatus
PROMOS TECHNOLOGIES INC18 citations73
US6053802AApr 25, 2000
Stabilization of slurry used in chemical mechanical polishing of semiconductor wafers by megasonic pulse
PROMOS TECHNOLOGIES INC8 citations71
US6817924B1Nov 16, 2004
Chemical mechanical polishing apparatus, profile control system and conditioning method thereof
PROMOS TECHNOLOGIES INC6 citations51