Inventor
VELAZQUEZ EFRAIN
US9 patents
⚠️ This page may combine multiple inventors who share the name “VELAZQUEZ EFRAIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM NUTOOL INC
4 patentsUS6942546B2Sep 13, 2005
Endpoint detection for non-transparent polishing member
ASM NUTOOL INC23 citations91
US6857947B2Feb 22, 2005
Advanced chemical mechanical polishing system with smart endpoint detection
ASM NUTOOL INC43 citations90
US6967166B2Nov 22, 2005
Method for monitoring and controlling force applied on workpiece surface during electrochemical mechanical processing
ASM NUTOOL INC5 citations60
US6908368B2Jun 21, 2005
Advanced Bi-directional linear polishing system and method
ASM NUTOOL INC0 citations48