Inventor
FELSNER PETRA
DE7 patents
Patents
7 patentsUS6949442B2Sep 27, 2005
Methods of forming MIM capacitors
INFINEON TECHNOLOGIES AG112 citations98
US6730982B2May 4, 2004
FBEOL process for Cu metallizations free from Al-wirebond pads
INFINEON TECHNOLOGIES AG74 citations97
US6451664B1Sep 17, 2002
Method of making a MIM capacitor with self-passivating plates
INFINEON TECHNOLOGIES AG51 citations94
US7615440B2Nov 10, 2009
Capacitor and method of manufacturing a capacitor
INFINEON TECHNOLOGIES AG7 citations72
US7843035B2Nov 30, 2010
MIM capacitors with catalytic activation layer
INFINEON TECHNOLOGIES AG1 citations62
US7436016B2Oct 14, 2008
MIM capacitor with a cap layer over the conductive plates
INFINEON TECHNOLOGIES AG3 citations62
US7268383B2Sep 11, 2007
Capacitor and method of manufacturing a capacitor
INFINEON TECHNOLOGIES AG3 citations61