Inventor
RAU JENSPETER
DE7 patents
Patents
7 patentsUS7090948B2Aug 15, 2006
Reflection mask and method for fabricating the reflection mask
INFINEON TECHNOLOGIES AG11 citations81
US7408646B2Aug 5, 2008
Method and apparatus for determining local variation of the reflection or transmission behavior over a mask surface
INFINEON TECHNOLOGIES AG8 citations71
US7229723B2Jun 12, 2007
Method for forming an opening in a light-absorbing layer on a mask
INFINEON TECHNOLOGIES AG7 citations70
US7029808B2Apr 18, 2006
Photosensitive coating material for a substrate and process for exposing the coated substrate
INFINEON TECHNOLOGIES AG6 citations61
US6707123B2Mar 16, 2004
EUV reflection mask
INFINEON TECHNOLOGIES AG4 citations59
US7060399B2Jun 13, 2006
Reflective mirror for lithographic exposure and production method
INFINEON TECHNOLOGIES AG0 citations50
US7400379B2Jul 15, 2008
Apparatus for measuring an exposure intensity on a wafer
INFINEON TECHNOLOGIES AG0 citations40