Inventor
KAMM FRANK-MICHAEL
DE17 patents
⚠️ This page may combine multiple inventors who share the name “KAMM FRANK-MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
11 patentsUS7073969B2Jul 11, 2006
Method for fabricating a photomask for an integrated circuit and corresponding photomask
INFINEON TECHNOLOGIES AG78 citations97
US6835508B2Dec 28, 2004
Large-area membrane mask and method for fabricating the mask
INFINEON TECHNOLOGIES AG43 citations90
US6841786B2Jan 11, 2005
Method and configuration for compensating for unevenness in the surface of a substrate
INFINEON TECHNOLOGIES AG15 citations83
US7376512B2May 20, 2008
Method for determining an optimal absorber stack geometry of a lithographic reflection mask
INFINEON TECHNOLOGIES AG13 citations79
US7408646B2Aug 5, 2008
Method and apparatus for determining local variation of the reflection or transmission behavior over a mask surface
INFINEON TECHNOLOGIES AG8 citations71
US7094507B2Aug 22, 2006
Method for determining an optimal absorber stack geometry of a lithographic reflection mask
INFINEON TECHNOLOGIES AG9 citations69
US7166393B2Jan 23, 2007
Reflection mask for projecting a structure onto a semiconductor wafer and method for producing the mask
INFINEON TECHNOLOGIES AG2 citations62
US7078135B2Jul 18, 2006
Method for patterning a mask layer and semiconductor product
INFINEON TECHNOLOGIES AG4 citations60
US6773854B2Aug 10, 2004
Method of producing a perforated mask for particle radiation
INFINEON TECHNOLOGIES AG5 citations55
US7060399B2Jun 13, 2006
Reflective mirror for lithographic exposure and production method
INFINEON TECHNOLOGIES AG0 citations50
US7588867B2Sep 15, 2009
Reflection mask, use of the reflection mask and method for fabricating the reflection mask
INFINEON TECHNOLOGIES AG1 citations49
GIESECKE & DEVRIENT MOBILE SECURITY GMBH
5 patentsUS10764260B2Sep 1, 2020
Distributed processing of a product on the basis of centrally encrypted stored data
GIESECKE & DEVRIENT MOBILE SECURITY GMBH2 citations71
US11258777B2Feb 22, 2022
Method for carrying out a two-factor authentication
GIESECKE & DEVRIENT MOBILE SECURITY GMBH2 citations69
US11184343B2Nov 23, 2021
Method for carrying out an authentication
GIESECKE & DEVRIENT MOBILE SECURITY GMBH3 citations67
US11343074B2May 24, 2022
Block-chain based identity system
GIESECKE & DEVRIENT MOBILE SECURITY GMBH1 citations62
US11341232B2May 24, 2022
Smart card as a security token
GIESECKE & DEVRIENT MOBILE SECURITY GMBH0 citations42