P

Inventor

KAMM FRANK-MICHAEL

DE17 patents
⚠️ This page may combine multiple inventors who share the name “KAMM FRANK-MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

INFINEON TECHNOLOGIES AG

11 patents
US7073969B2Jul 11, 2006

Method for fabricating a photomask for an integrated circuit and corresponding photomask

INFINEON TECHNOLOGIES AG78 citations97
US6835508B2Dec 28, 2004

Large-area membrane mask and method for fabricating the mask

INFINEON TECHNOLOGIES AG43 citations90
US6841786B2Jan 11, 2005

Method and configuration for compensating for unevenness in the surface of a substrate

INFINEON TECHNOLOGIES AG15 citations83
US7376512B2May 20, 2008

Method for determining an optimal absorber stack geometry of a lithographic reflection mask

INFINEON TECHNOLOGIES AG13 citations79
US7408646B2Aug 5, 2008

Method and apparatus for determining local variation of the reflection or transmission behavior over a mask surface

INFINEON TECHNOLOGIES AG8 citations71
US7094507B2Aug 22, 2006

Method for determining an optimal absorber stack geometry of a lithographic reflection mask

INFINEON TECHNOLOGIES AG9 citations69
US7166393B2Jan 23, 2007

Reflection mask for projecting a structure onto a semiconductor wafer and method for producing the mask

INFINEON TECHNOLOGIES AG2 citations62
US7078135B2Jul 18, 2006

Method for patterning a mask layer and semiconductor product

INFINEON TECHNOLOGIES AG4 citations60
US6773854B2Aug 10, 2004

Method of producing a perforated mask for particle radiation

INFINEON TECHNOLOGIES AG5 citations55
US7060399B2Jun 13, 2006

Reflective mirror for lithographic exposure and production method

INFINEON TECHNOLOGIES AG0 citations50
US7588867B2Sep 15, 2009

Reflection mask, use of the reflection mask and method for fabricating the reflection mask

INFINEON TECHNOLOGIES AG1 citations49

GIESECKE & DEVRIENT MOBILE SECURITY GMBH

5 patents

QIMONDA AG

1 patent