Inventor
KANAI HIDEKI
JP20 patents
⚠️ This page may combine multiple inventors who share the name “KANAI HIDEKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
15 patentsUS5792376AAug 11, 1998
Plasma processing apparatus and plasma processing method
TOSHIBA KK191 citations99
US6165692ADec 26, 2000
Method for manufacturing a semiconductor device and an exposure mask used therefor
TOSHIBA KK62 citations96
US6165907ADec 26, 2000
Plasma etching method and plasma etching apparatus
TOSHIBA KK20 citations92
US7812972B2Oct 12, 2010
Reticle, apparatus for monitoring optical system, method for monitoring optical system, and method for manufacturing reticle
TOSHIBA KK8 citations84
US7638244B2Dec 29, 2009
Method of correcting mask data, method of manufacturing a mask and method of manufacturing a semiconductor device
TOSHIBA KK12 citations83
US7432021B2Oct 7, 2008
Reticle, apparatus for monitoring optical system, method for monitoring optical system, and method for manufacturing reticle
TOSHIBA KK6 citations74
US7094504B2Aug 22, 2006
Mask, manufacturing method for mask, and manufacturing method for semiconductor device
TOSHIBA KK7 citations74
US6159642ADec 12, 2000
Exposure mask and method of manufacturing thereof, and pattern data generating method for an exposure mask
TOSHIBA KK15 citations74
US9023222B2May 5, 2015
Pattern forming method
TOSHIBA KK4 citations72
US7399557B2Jul 15, 2008
Photomask correcting method and manufacturing method of semiconductor device
TOSHIBA KK2 citations62
US7541136B2Jun 2, 2009
Mask, manufacturing method for mask, and manufacturing method for semiconductor device
TOSHIBA KK0 citations52
US7912275B2Mar 22, 2011
Method of evaluating a photo mask and method of manufacturing a semiconductor device
TOSHIBA KK0 citations51
US7670755B2Mar 2, 2010
Photomask correcting method and manufacturing method of semiconductor device
TOSHIBA KK0 citations51
US9607887B1Mar 28, 2017
Method of manufacturing semiconductor device
TOSHIBA KK0 citations41
US9696628B2Jul 4, 2017
Pattern forming method
TOSHIBA KK0 citations40