Inventor
TOREK KEVIN
US17 patents
⚠️ This page may combine multiple inventors who share the name “TOREK KEVIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MICRON TECHNOLOGY INC
13 patentsUS5783495AJul 21, 1998
Method of wafer cleaning, and system and cleaning solution regarding same
MICRON TECHNOLOGY INC173 citations99
US6235145B1May 22, 2001
System for wafer cleaning
MICRON TECHNOLOGY INC110 citations98
US6290863B1Sep 18, 2001
Method and apparatus for etch of a specific subarea of a semiconductor work object
MICRON TECHNOLOGY INC79 citations96
US7179717B2Feb 20, 2007
Methods of forming integrated circuit devices
MICRON TECHNOLOGY INC39 citations92
US7214978B2May 8, 2007
Semiconductor fabrication that includes surface tension control
MICRON TECHNOLOGY INC6 citations73
US7109089B2Sep 19, 2006
Semiconductor fabrication using a collar
MICRON TECHNOLOGY INC7 citations73
US6734089B1May 11, 2004
Techniques for improving wordline fabrication of a memory device
MICRON TECHNOLOGY INC9 citations73
US9613864B2Apr 4, 2017
Low capacitance interconnect structures and associated systems and methods
MICRON TECHNOLOGY INC3 citations71
US7468323B2Dec 23, 2008
Method of forming high aspect ratio structures
MICRON TECHNOLOGY INC6 citations69
US7541635B2Jun 2, 2009
Semiconductor fabrication using a collar
MICRON TECHNOLOGY INC2 citations62
US7453134B2Nov 18, 2008
Integrated circuit device with a circuit element formed on an active region having rounded corners
MICRON TECHNOLOGY INC0 citations52
US9911653B2Mar 6, 2018
Low capacitance interconnect structures and associated systems and methods
MICRON TECHNOLOGY INC0 citations51
US7932550B2Apr 26, 2011
Method of forming high aspect ratio structures
MICRON TECHNOLOGY INC0 citations48