Inventor
FRENCKEN MARK JOHANNES HERMANUS
NL9 patents
Patents
9 patentsUS10895808B2Jan 19, 2021
Substrate holder, a lithographic apparatus and method of manufacturing devices
ASML NETHERLANDS BV2 citations70
US11579533B2Feb 14, 2023
Substrate holder, a lithographic apparatus and method of manufacturing devices
ASML NETHERLANDS BV0 citations60
US11860546B2Jan 2, 2024
Fluid handling structure for lithographic apparatus
ASML NETHERLANDS BV0 citations59
US11454892B2Sep 27, 2022
Fluid handling structure for lithographic apparatus
ASML NETHERLANDS BV0 citations59
US11029607B2Jun 8, 2021
Fluid handling structure for lithographic apparatus
ASML NETHERLANDS BV0 citations59
US11860554B2Jan 2, 2024
Object positioner, method for correcting the shape of an object, lithographic apparatus, object inspection apparatus, device manufacturing method
ASML NETHERLANDS BV0 citations53
US7859644B2Dec 28, 2010
Lithographic apparatus, immersion projection apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US11243476B2Feb 8, 2022
Stage apparatus, lithographic apparatus, control unit and method
ASML NETHERLANDS BV0 citations46
US9377697B2Jun 28, 2016
Lithographic apparatus and table for use in such an apparatus
ASML NETHERLANDS BV0 citations36