P

Inventor

MOON YONG MO

US7 patents
⚠️ This page may combine multiple inventors who share the name “MOON YONG MO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

UNIV MICHIGAN

3 patents
US6569071B1May 27, 2003

Reconfigurable multi-spindle apparatus

UNIV MICHIGAN16 citations83
US6442815B1Sep 3, 2002

Reconfigurable automatic tool changer

UNIV MICHIGAN17 citations82
US6309319B1Oct 30, 2001

Reconfigurable power spindle

UNIV MICHIGAN3 citations61

KLA TENCOR CORP

3 patents
US9546962B2Jan 17, 2017

Multi-spot scanning collection optics

KLA TENCOR CORP4 citations69
US9423357B2Aug 23, 2016

Oblique illuminator for inspecting manufactured substrates

KLA TENCOR CORP0 citations49
US9970883B2May 15, 2018

Multi-spot scanning collection optics

KLA TENCOR CORP1 citations48

ZHANG SHIYU

1 patent
US8794801B2Aug 5, 2014

Oblique illuminator for inspecting manufactured substrates

ZHANG SHIYU0 citations43