Inventor
WALDMANN OLE
US7 patents
Patents
7 patentsUS9779974B2Oct 3, 2017
System and method for reducing temperature transition in an electrostatic chuck
LAM RES CORP6 citations82
US10096506B2Oct 9, 2018
Reducing temperature transition in a substrate support
LAM RES CORP2 citations71
US9716022B2Jul 25, 2017
Method of determining thermal stability of a substrate support assembly
LAM RES CORP2 citations70
US9922855B2Mar 20, 2018
Method for reducing temperature transition in an electrostatic chuck
LAM RES CORP1 citations61
US9435692B2Sep 6, 2016
Calculating power input to an array of thermal control elements to achieve a two-dimensional temperature output
LAM RES CORP2 citations60
US9543171B2Jan 10, 2017
Auto-correction of malfunctioning thermal control element in a temperature control plate of a semiconductor substrate support assembly that includes deactivating the malfunctioning thermal control element and modifying a power level of at least one functioning thermal control element
LAM RES CORP1 citations51
US10437236B2Oct 8, 2019
Method of determining thermal stability of a substrate support assembly
LAM RES CORP0 citations49