Inventor

MAULA JARMO

FI8 patents

⚠️ This page may combine multiple inventors who share the name “MAULA JARMO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BENEQ OY

3 patents

US8367561B2Feb 5, 2013

Method in depositing metal oxide materials

BENEQ OY3 citations59

US9892814B2Feb 13, 2018

Method for forming an electrically conductive oxide film, an electrically conductive oxide film, and uses for the same

BENEQ OY1 citations49

US10590536B2Mar 17, 2020

Apparatus, method and reaction chamber

BENEQ OY0 citations45

MAULA JARMO

2 patents

US9290840B2Mar 22, 2016

Method for forming an electrically conductive oxide film, an electrically conductive oxide film, and uses for the same

MAULA JARMO4 citations68

US8945676B2Feb 3, 2015

Method and apparatus for coating

MAULA JARMO2 citations57

PLANAR SYSTEMS INC

1 patent

US7141095B2Nov 28, 2006

Precursor material delivery system for atomic layer deposition

PLANAR SYSTEMS INC40 citations89

PLANAR SYSTEMS OY

1 patent

US7901736B2Mar 8, 2011

Multilayer material and method of preparing same

PLANAR SYSTEMS OY11 citations77

SODERLUND MIKKO

1 patent

US10167551B2Jan 1, 2019

Apparatus, method and reaction chamber

SODERLUND MIKKO0 citations39