Inventor
KAZUYA ONO
KR2 patents
Patents
2 patentsUS12387963B2Aug 12, 2025
Optical assembly for alignment inspection, optical apparatus including the same, die bonding system and die bonding method using the same
SAMSUNG ELECTRONICS CO LTD0 citations46
US10635006B2Apr 28, 2020
Chuck-driving device and substrate-processing apparatus
SAMSUNG ELECTRONICS CO LTD0 citations33