Inventor
SINGH KANWAL JIT
US22 patents
⚠️ This page may combine multiple inventors who share the name “SINGH KANWAL JIT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEL CORP
14 patentsUS10032643B2Jul 24, 2018
Method and structure to contact tight pitch conductive layers with guided vias using alternating hardmasks and encapsulating etchstop liner scheme
INTEL CORP16 citations84
US9754886B2Sep 5, 2017
Semiconductor interconnect structures
INTEL CORP5 citations84
US9627321B2Apr 18, 2017
Methods and apparatuses to form self-aligned caps
INTEL CORP4 citations84
US9406615B2Aug 2, 2016
Techniques for forming interconnects in porous dielectric materials
INTEL CORP6 citations84
US10446493B2Oct 15, 2019
Methods and apparatuses to form self-aligned caps
INTEL CORP1 citations73
US9553018B2Jan 24, 2017
Self-aligned via and plug patterning with photobuckets for back end of line (BEOL) interconnects
INTEL CORP3 citations73
US9455224B2Sep 27, 2016
Semiconductor interconnect structures
INTEL CORP3 citations73
US9379010B2Jun 28, 2016
Methods for forming interconnect layers having tight pitch interconnect structures
INTEL CORP4 citations73
US10727183B2Jul 28, 2020
Methods and apparatuses to form self-aligned caps
INTEL CORP0 citations52
US10147639B2Dec 4, 2018
Via self alignment and shorting improvement with airgap integration capacitance benefit
INTEL CORP1 citations52
US9887161B2Feb 6, 2018
Techniques for forming interconnects in porous dielectric materials
INTEL CORP0 citations52
US10593627B2Mar 17, 2020
Doric pillar supported maskless airgap structure for capacitance benefit with unlanded via solution
INTEL CORP0 citations50
US10457548B2Oct 29, 2019
Integrating MEMS structures with interconnects and vias
INTEL CORP0 citations50
US9659869B2May 23, 2017
Forming barrier walls, capping, or alloys /compounds within metal lines
INTEL CORP1 citations49
BRISTOL ROBERT L
3 patentsUS9041217B1May 26, 2015
Self-aligned via patterning with multi-colored photobuckets for back end of line (BEOL) interconnects
BRISTOL ROBERT L53 citations97
US9406512B2Aug 2, 2016
Self-aligned via patterning with multi-colored photobuckets for back end of line (BEOL) interconnects
BRISTOL ROBERT L16 citations92
US9236342B2Jan 12, 2016
Self-aligned via and plug patterning with photobuckets for back end of line (BEOL) interconnects
BRISTOL ROBERT L21 citations92