Inventor
YAU ALLISON
US8 patents
Patents
8 patentsUS12381106B2Aug 5, 2025
Systems and methods of seasoning electrostatic chucks with dielectric seasoning films
APPLIED MATERIALS INC0 citations61
US12315724B2May 27, 2025
Helium-free silicon formation
APPLIED MATERIALS INC0 citations61
US12211908B2Jan 28, 2025
Profile shaping for control gate recesses
APPLIED MATERIALS INC0 citations61
US11784229B2Oct 10, 2023
Profile shaping for control gate recesses
APPLIED MATERIALS INC1 citations61
US11646216B2May 9, 2023
Systems and methods of seasoning electrostatic chucks with dielectric seasoning films
APPLIED MATERIALS INC1 citations61
US11538677B2Dec 27, 2022
Systems and methods for depositing high density and high tensile stress films
APPLIED MATERIALS INC0 citations60
US12159785B2Dec 3, 2024
Dynamic multi zone flow control for a processing system
APPLIED MATERIALS INC0 citations58
US11798803B2Oct 24, 2023
Dynamic multi zone flow control for a processing system
APPLIED MATERIALS INC0 citations58