Inventor
ZHAO ZEQIONG
US7 patents
Patents
7 patentsUS12381106B2Aug 5, 2025
Systems and methods of seasoning electrostatic chucks with dielectric seasoning films
APPLIED MATERIALS INC0 citations61
US12315724B2May 27, 2025
Helium-free silicon formation
APPLIED MATERIALS INC0 citations61
US12211908B2Jan 28, 2025
Profile shaping for control gate recesses
APPLIED MATERIALS INC0 citations61
US11784229B2Oct 10, 2023
Profile shaping for control gate recesses
APPLIED MATERIALS INC1 citations61
US11646216B2May 9, 2023
Systems and methods of seasoning electrostatic chucks with dielectric seasoning films
APPLIED MATERIALS INC1 citations61
US11587789B2Feb 21, 2023
System and method for radical and thermal processing of substrates
APPLIED MATERIALS INC0 citations60
US12394606B2Aug 19, 2025
Impedance control of local areas of a substrate during plasma deposition thereon in a large PECVD chamber
APPLIED MATERIALS INC0 citations44