Inventor
HSU HSING-PIAO
TW7 patents
Patents
7 patentsUS11060980B2Jul 13, 2021
Broadband wafer defect detection
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US10269530B1Apr 23, 2019
Ion beam source for semiconductor ion implantation
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US11527382B2Dec 13, 2022
Ion implantation gas supply system
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations68
US11081315B2Aug 3, 2021
Ion impantation gas supply system
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations68
US12158434B2Dec 3, 2024
Broadband wafer defect detection
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11852593B2Dec 26, 2023
Broadband wafer defect detection
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations60
US11961707B2Apr 16, 2024
Ion implantation gas supply system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58