Inventor
OU PING-CHIH
TW3 patents
Patents
3 patentsUS11527382B2Dec 13, 2022
Ion implantation gas supply system
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations68
US11081315B2Aug 3, 2021
Ion impantation gas supply system
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations68
US11961707B2Apr 16, 2024
Ion implantation gas supply system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58