Inventor
UEBEL PATRICK SEBASTIAN
DE33 patents
⚠️ This page may combine multiple inventors who share the name “UEBEL PATRICK SEBASTIAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
27 patentsUS11360396B2Jun 14, 2022
Mode control of photonic crystal fiber based broadband radiation sources
ASML NETHERLANDS BV45 citations95
US11237486B2Feb 1, 2022
Radiation source
ASML NETHERLANDS BV6 citations85
US11099319B2Aug 24, 2021
Optical fiber
ASML NETHERLANDS BV19 citations85
US11163208B2Nov 2, 2021
Hollow-core photonic crystal fiber based optical component for broadband radiation generation
ASML NETHERLANDS BV8 citations83
US11774828B2Oct 3, 2023
Supercontinuum radiation source and associated metrology devices
ASML NETHERLANDS BV2 citations72
US11556044B2Jan 17, 2023
Hollow-core photonic crystal fiber based optical component for broadband radiation generation
ASML NETHERLANDS BV2 citations72
US11846867B2Dec 19, 2023
Hollow-core photonic crystal fiber based broadband radiation generator
ASML NETHERLANDS BV3 citations71
US11372154B2Jun 28, 2022
Method, assembly, and apparatus for improved control of broadband radiation generation
ASML NETHERLANDS BV2 citations71
US12517297B2Jan 6, 2026
Hollow-core photonic crystal fiber
ASML NETHERLANDS BV0 citations62
US12366810B2Jul 22, 2025
Radiation source
ASML NETHERLANDS BV0 citations62
US12204229B2Jan 21, 2025
Supercontinuum radiation source and associated metrology devices
ASML NETHERLANDS BV0 citations62
US11754906B2Sep 12, 2023
Hollow-core photonic crystal fiber based optical component for broadband radiation generation
ASML NETHERLANDS BV0 citations62
US11703634B2Jul 18, 2023
Mounted hollow-core fiber arrangement
ASML NETHERLANDS BV0 citations62
US11467339B2Oct 11, 2022
Radiation source and a method for use in metrology applications
ASML NETHERLANDS BV0 citations62
US11385402B2Jul 12, 2022
Mounted hollow-core fiber arrangement
ASML NETHERLANDS BV0 citations62
US10969542B2Apr 6, 2021
Radiation source with temperature-controlled hollow fiber and a method for use in metrology applications
ASML NETHERLANDS BV1 citations62
US12306433B2May 20, 2025
Hollow-core photonic crystal fiber based optical component for broadband radiation generation
ASML NETHERLANDS BV0 citations61
US11971663B2Apr 30, 2024
Light sources and methods of controlling; devices and methods for use in measurement applications
ASML NETHERLANDS BV0 citations61
US11774671B2Oct 3, 2023
Hollow-core photonic crystal fiber based optical component for broadband radiation generation
ASML NETHERLANDS BV0 citations61
US11733617B2Aug 22, 2023
Frequency broadening apparatus and method
ASML NETHERLANDS BV0 citations61
US11262665B2Mar 1, 2022
Frequency broadening apparatus and method
ASML NETHERLANDS BV1 citations61
US12393095B2Aug 19, 2025
Hollow-core photonic crystal fiber based broadband radiation generator
ASML NETHERLANDS BV0 citations60
US11287747B2Mar 29, 2022
End facet protection for a radiation source and a method for use in metrology applications
ASML NETHERLANDS BV0 citations60
US12386270B2Aug 12, 2025
Mode control of photonic crystal fiber based broadband radiation sources
ASML NETHERLANDS BV0 citations59
US11687009B2Jun 27, 2023
Mode control of photonic crystal fiber based broadband radiation sources
ASML NETHERLANDS BV0 citations59
US12591132B2Mar 31, 2026
Methods and apparatuses for spatially filtering optical pulses
ASML NETHERLANDS BV0 citations57
US12535743B2Jan 27, 2026
Radiation source arrangement and metrology device
ASML NETHERLANDS BV0 citations53
MAX PLANCK GESELLSCHAFT
6 patentsUS10693271B2Jun 23, 2020
Broadband light source device and method of creating broadband light pulses
MAX PLANCK GESELLSCHAFT19 citations93
US11029464B2Jun 8, 2021
Hollow-core photonic crystal fiber and method of manufacturing thereof
MAX PLANCK GESELLSCHAFT10 citations85
US11640028B2May 2, 2023
Hollow-core photonic crystal fiber and method of manufacturing thereof
MAX PLANCK GESELLSCHAFT3 citations72
US11205884B2Dec 21, 2021
Broadband light source device and method of creating broadband light pulses
MAX PLANCK GESELLSCHAFT2 citations72
US12184030B2Dec 31, 2024
Broadband light source device and method of creating broadband light pulses
MAX PLANCK GESELLSCHAFT0 citations62
US11688992B2Jun 27, 2023
Broadband light source device and method of creating broadband light pulses
MAX PLANCK GESELLSCHAFT0 citations62