P

Inventor

BERSIN RICHARD L

12 patents
⚠️ This page may combine multiple inventors who share the name “BERSIN RICHARD L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ULVAC TECHNOLOGIES INC

3 patents
US5882489AMar 16, 1999

Processes for cleaning and stripping photoresist from surfaces of semiconductor wafers

ULVAC TECHNOLOGIES INC124 citations97
US5908319AJun 1, 1999

Cleaning and stripping of photoresist from surfaces of semiconductor wafers

ULVAC TECHNOLOGIES INC54 citations95
US5795831AAug 18, 1998

Cold processes for cleaning and stripping photoresist from surfaces of semiconductor wafers

ULVAC TECHNOLOGIES INC67 citations94

EMERGENT TECHNOLOGIES CORP

3 patents
US4699689AOct 13, 1987

Method and apparatus for dry processing of substrates

EMERGENT TECHNOLOGIES CORP80 citations95
US4689112AAug 25, 1987

Method and apparatus for dry processing of substrates

EMERGENT TECHNOLOGIES CORP59 citations95
US4687544AAug 18, 1987

Method and apparatus for dry processing of substrates

EMERGENT TECHNOLOGIES CORP91 citations95

DIONEX CORP

2 patents
US4148705AApr 10, 1979

Gas plasma reactor and process

DIONEX CORP58 citations94
US4127437ANov 28, 1978

Process for etching SiO2 utilizing HF vapor and an organic catalyst

DIONEX CORP29 citations77

BRANSON INT PLASMA

2 patents
US4303467ADec 1, 1981

Process and gas for treatment of semiconductor devices

BRANSON INT PLASMA81 citations91
US5099100AMar 24, 1992

Plasma etching device and process

BRANSON INT PLASMA48 citations86

ULVAC CORP

1 patent
US5228052AJul 13, 1993

Plasma ashing apparatus

ULVAC CORP46 citations91

PERKIN ELMER CORP

1 patent
US4364413ADec 21, 1982

Molar gas-flow controller

PERKIN ELMER CORP38 citations86