P

Inventor

REICHELDERFER RICHARD F

5 patents
⚠️ This page may combine multiple inventors who share the name “REICHELDERFER RICHARD F”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BRANSON INT PLASMA

3 patents
US4313783AFeb 2, 1982

Computer controlled system for processing semiconductor wafers

BRANSON INT PLASMA221 citations96
US4324611AApr 13, 1982

Process and gas mixture for etching silicon dioxide and silicon nitride

BRANSON INT PLASMA410 citations94
US4380488AApr 19, 1983

Process and gas mixture for etching aluminum

BRANSON INT PLASMA32 citations88

DIONEX CORP

2 patents
US4148705AApr 10, 1979

Gas plasma reactor and process

DIONEX CORP58 citations94
US4127437ANov 28, 1978

Process for etching SiO2 utilizing HF vapor and an organic catalyst

DIONEX CORP29 citations77