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Inventor
BOSWELL RODERICK W
AU
4 patents
⚠️ This page may combine multiple inventors who share the name “BOSWELL RODERICK W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
OREGON PHYSICS LLC
2 patents
US9655223B2
May 16, 2017
RF system, magnetic filter, and high voltage isolation for an inductively coupled plasma ion source
OREGON PHYSICS LLC
3 citations
67
US10128076B1
Nov 13, 2018
Inductively coupled plasma ion source with tunable radio frequency power
OREGON PHYSICS LLC
3 citations
66
UNIV AUSTRALIAN
1 patent
US4810935A
Mar 7, 1989
Method and apparatus for producing large volume magnetoplasmas
UNIV AUSTRALIAN
142 citations
93
LAM RES CORP
1 patent
US9966231B2
May 8, 2018
Direct current pulsing plasma systems
LAM RES CORP
25 citations
91