Inventor
BRUNNER RUDOLF
DE40 patents
⚠️ This page may combine multiple inventors who share the name “BRUNNER RUDOLF”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HEILMEIER & WEINLEIN
20 patentsUS5259293ANov 9, 1993
Hydraulic control device
HEILMEIER & WEINLEIN75 citations96
US5191826AMar 9, 1993
Hydraulic control device
HEILMEIER & WEINLEIN47 citations92
US3992133ANov 16, 1976
Pressure fluid pump
HEILMEIER & WEINLEIN40 citations92
US5063961ANov 12, 1991
Screw-type valve housing
HEILMEIER & WEINLEIN13 citations74
US4863141ASep 5, 1989
Electromagnetically operable valve
HEILMEIER & WEINLEIN8 citations74
US4594056AJun 10, 1986
Hydraulic pump unit
HEILMEIER & WEINLEIN13 citations74
US4590958AMay 27, 1986
Two-position switching valve having hydraulic self-holding properties
HEILMEIER & WEINLEIN12 citations74
US4557294ADec 10, 1985
Control valve with piston compensated by discharge pressure
HEILMEIER & WEINLEIN12 citations74
US4711155ADec 8, 1987
Hydraulic control device
HEILMEIER & WEINLEIN4 citations63
US4617962AOct 21, 1986
Hydraulic device
HEILMEIER & WEINLEIN5 citations63
US4532960AAug 6, 1985
Control valve device
HEILMEIER & WEINLEIN2 citations63
US4503882AMar 12, 1985
Flow valve
HEILMEIER & WEINLEIN5 citations63
US4495961AJan 29, 1985
Flow divider
HEILMEIER & WEINLEIN6 citations63
US4406305ASep 27, 1983
Control valve
HEILMEIER & WEINLEIN2 citations63
US4323087AApr 6, 1982
Control valve
HEILMEIER & WEINLEIN6 citations63
US4301837ANov 24, 1981
Control valve
HEILMEIER & WEINLEIN4 citations63
US6341761B1Jan 29, 2002
Seated valve
HEILMEIER & WEINLEIN6 citations62
US6047629AApr 11, 2000
Hydraulic pump
HEILMEIER & WEINLEIN3 citations56
US4739980AApr 26, 1988
Hydromechanical tool or workpiece clamping apparatus
HEILMEIER & WEINLEIN1 citations52
US4453453AJun 12, 1984
Hydraulic control device
HEILMEIER & WEINLEIN0 citations42
KLA TENCOR CORP
11 patentsUS5970168AOct 19, 1999
Fourier filtering mechanism for inspecting wafers
KLA TENCOR CORP78 citations94
US9645287B2May 9, 2017
Flexible optical aperture mechanisms
KLA TENCOR CORP15 citations84
US9255887B2Feb 9, 2016
2D programmable aperture mechanism
KLA TENCOR CORP15 citations84
US9927094B2Mar 27, 2018
Plasma cell for providing VUV filtering in a laser-sustained plasma light source
KLA TENCOR CORP11 citations83
US8896827B2Nov 25, 2014
Diode laser based broad band light sources for wafer inspection tools
KLA TENCOR CORP10 citations82
US10244613B2Mar 26, 2019
System and method for electrodeless plasma ignition in laser-sustained plasma light source
KLA TENCOR CORP5 citations71
US10976025B2Apr 13, 2021
Plasma cell for providing VUV filtering in a laser-sustained plasma light source
KLA TENCOR CORP0 citations62
US9523646B2Dec 20, 2016
Wafer and reticle inspection systems and methods for selecting illumination pupil configurations
KLA TENCOR CORP0 citations52
US9347891B2May 24, 2016
Wafer and reticle inspection systems and methods for selecting illumination pupil configurations
KLA TENCOR CORP1 citations52
US9110037B2Aug 18, 2015
Diode laser based broad band light sources for wafer inspection tools
KLA TENCOR CORP1 citations51
US9534848B2Jan 3, 2017
Method and apparatus to reduce thermal stress by regulation and control of lamp operating temperatures
KLA TENCOR CORP1 citations48