Inventor
MISHIMA AKIFUMI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “MISHIMA AKIFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI MATERIALS CORP
4 patentsUS6176986B1Jan 23, 2001
Sputtering target of dielectrics having high strength and a method for manufacturing same
MITSUBISHI MATERIALS CORP82 citations95
US5282946AFeb 1, 1994
Platinum-cobalt alloy sputtering target and method for manufacturing same
MITSUBISHI MATERIALS CORP89 citations95
US5338425AAug 16, 1994
Target units
MITSUBISHI MATERIALS CORP16 citations72
US5997704ADec 7, 1999
Sputtering target for depositing ferroelectric film, method for preparing the same, and method for preparing a DRAM using the same
MITSUBISHI MATERIALS CORP13 citations69
ZHANG SHOUBIN
3 patentsUS8466077B2Jun 18, 2013
Sputtering target for forming ZrO2-In2O3 based protective film for optical storage medium
ZHANG SHOUBIN2 citations60
US8268141B2Sep 18, 2012
High-strength sputtering target for forming protective film for optical recording medium
ZHANG SHOUBIN3 citations60
US8105467B2Jan 31, 2012
High strength sputtering target for forming phosphor film in electroluminescence element
ZHANG SHOUBIN2 citations60