Inventor
ISOBE SOICHI
JP18 patents
⚠️ This page may combine multiple inventors who share the name “ISOBE SOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
17 patentsUS7063598B2Jun 20, 2006
Substrate delivery mechanism
EBARA CORP19 citations92
US6783445B2Aug 31, 2004
Polishing apparatus
EBARA CORP22 citations92
US5716036AFeb 10, 1998
Mounting structure for mounting a polygon mirror
EBARA CORP39 citations92
US8382558B2Feb 26, 2013
Apparatus for dressing a polishing pad, chemical mechanical polishing apparatus and method
EBARA CORP14 citations83
US7645185B2Jan 12, 2010
Substrate delivery mechanism
EBARA CORP5 citations73
US7083506B2Aug 1, 2006
Polishing apparatus
EBARA CORP6 citations73
US6783427B2Aug 31, 2004
Polishing system with air exhaust system
EBARA CORP9 citations73
US6746312B2Jun 8, 2004
Polishing method and polishing apparatus
EBARA CORP9 citations73
US9144881B2Sep 29, 2015
Polishing apparatus and polishing method
EBARA CORP5 citations72
US10688622B2Jun 23, 2020
Substrate processing apparatus
EBARA CORP2 citations71
US5373391ADec 13, 1994
Polygon mirror with embedded yoke
EBARA CORP8 citations68
US5598291AJan 28, 1997
Polygon mirror mounting structure
EBARA CORP6 citations63
US7160180B2Jan 9, 2007
Substrate delivery mechanism
EBARA CORP3 citations62
US9842732B2Dec 12, 2017
Substrate cleaning apparatus and substrate cleaning method
EBARA CORP0 citations51
US9704728B2Jul 11, 2017
Substrate cleaning apparatus and substrate cleaning method
EBARA CORP0 citations51
US12358098B2Jul 15, 2025
Liquid feeder and polishing apparatus
EBARA CORP0 citations47
US11541502B2Jan 3, 2023
Substrate processing apparatus
EBARA CORP0 citations46