Inventor
KOYAMA MITSUTOSHI
JP9 patents
⚠️ This page may combine multiple inventors who share the name “KOYAMA MITSUTOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
8 patentsUS5189503AFeb 23, 1993
High dielectric capacitor having low current leakage
TOSHIBA KK128 citations97
US5990008ANov 23, 1999
Semiconductor device with pure copper wirings and method of manufacturing a semiconductor device with pure copper wirings
TOSHIBA KK19 citations92
US5589421ADec 31, 1996
Method of manufacturing annealed films
TOSHIBA KK27 citations92
US5127365AJul 7, 1992
Vertical heat-treatment apparatus for semiconductor parts
TOSHIBA KK39 citations92
US4485000ANov 27, 1984
Sputtering target supporting device
TOSHIBA KK41 citations90
US5380399AJan 10, 1995
Method of treating semiconductor substrates
TOSHIBA KK15 citations73
US5111272AMay 5, 1992
Semiconductor device having element regions electrically isolated from each other
TOSHIBA KK7 citations73
US6424045B2Jul 23, 2002
Semiconductor device with pure copper wirings and method of manufacturing a semiconductor device with pure copper wirings
TOSHIBA KK1 citations51