Inventor · disambiguated record
Kenji Marumoto
Also filed as: MARUMOTO KENJI
6 granted patents·1 pending application·393 citations·filing 1995–2001
85Inventor score
Files withMITSUBISHI ELECTRIC CORP7
Top patents by PatentIndex Score
7 records- 0195US6265113B1Stress adjustment method of X-ray maskMITSUBISHI ELECTRIC CORP·Filed 1998·Granted Jul 24, 2001·344 cites·18 claims
- 0260US5677090AMethod of making X-ray mask having reduced stressMITSUBISHI ELECTRIC CORP·Filed 1996·Granted Oct 14, 1997·20 cites·7 claims
- 0349US6212252B1X-ray mask provided with an alignment mark and method of manufacturing the sameMITSUBISHI ELECTRIC CORP·Filed 1998·Granted Apr 3, 2001·13 cites·11 claims
- 0441US5496667AX-ray mask and its fabrication methodMITSUBISHI ELECTRIC CORP·Filed 1995·Granted Mar 5, 1996·7 cites·8 claims
- 0540US5953492AMethod of manufacturing X-ray mask and heating apparatusMITSUBISHI ELECTRIC CORP·Filed 1997·Granted Sep 14, 1999·6 cites·10 claims
- 0634US5834142AMethod of manufacturing X-ray mask and heating apparatusMITSUBISHI ELECTRIC CORP·Filed 1996·Granted Nov 10, 1998·3 cites·18 claims
- 0733US2002196896A1Exposure method, exposure apparatus, X-ray mask, semiconductor device and microstructureMITSUBISHI ELECTRIC CORP·Filed 2001·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →