Inventor
YANAGAWA SHUSAKU
JP28 patents
⚠️ This page may combine multiple inventors who share the name “YANAGAWA SHUSAKU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SONY CORP
15 patentsUS6562736B2May 13, 2003
Manufacturing method for semiconductor device
SONY CORP37 citations90
US5843848ADec 1, 1998
Method of plasma etching
SONY CORP12 citations73
US10410884B2Sep 10, 2019
Wiring substrate, method of manufacturing wiring substrate, component-embedded glass substrate, and method of manufacturing component-embedded glass substrate
SONY CORP4 citations72
US9929199B2Mar 27, 2018
Radiation detector, imaging unit, and imaging and display system
SONY CORP5 citations72
US9723724B2Aug 1, 2017
Wiring substrate, method of manufacturing wiring substrate, component-embedded glass substrate, and method of manufacturing component-embedded glass substrate
SONY CORP2 citations72
US9257395B2Feb 9, 2016
Semiconductor device
SONY CORP3 citations72
US10763286B2Sep 1, 2020
Semiconductor device, manufacturing method thereof, and electronic apparatus
SONY CORP2 citations70
US6787457B2Sep 7, 2004
Method of etching and anti-reflection film using substituted hydrocarbon with halogen gas
SONY CORP7 citations68
US6923867B2Aug 2, 2005
Substrate processing apparatus and method for manufacturing semiconductor device
SONY CORP2 citations62
US10483413B2Nov 19, 2019
Photoelectric module and optical device
SONY CORP1 citations61
US10634862B2Apr 28, 2020
Optical communication device, reception apparatus, transmission apparatus, and transmission and reception system
SONY CORP0 citations51
US10168498B2Jan 1, 2019
Optical communication device, reception apparatus, transmission apparatus, and transmission and reception system
SONY CORP0 citations51
US10061036B2Aug 28, 2018
Radiation detector, method of manufacturing radiation detector, and imaging apparatus
SONY CORP0 citations51
US9614347B2Apr 4, 2017
Optical communication device, reception apparatus, transmission apparatus, and transmission and reception system
SONY CORP0 citations51
US10256117B2Apr 9, 2019
Manufacturing method and wiring substrate with through electrode
SONY CORP0 citations41
SONY SEMICONDUCTOR SOLUTIONS CORP
7 patentsUS11296136B2Apr 5, 2022
Imaging apparatus and manufacturing method for imaging apparatus
SONY SEMICONDUCTOR SOLUTIONS CORP5 citations73
US11527494B2Dec 13, 2022
Module and electronic apparatus
SONY SEMICONDUCTOR SOLUTIONS CORP0 citations62
US11355465B2Jun 7, 2022
Semiconductor device including glass substrate having improved reliability and method of manufacturing the same
SONY SEMICONDUCTOR SOLUTIONS CORP0 citations62
US11984639B2May 14, 2024
Antenna device and wireless communication apparatus
SONY SEMICONDUCTOR SOLUTIONS CORP0 citations61
US11417584B2Aug 16, 2022
Semiconductor device
SONY SEMICONDUCTOR SOLUTIONS CORP0 citations60
US12294152B2May 6, 2025
Radio frequency module and wireless device
SONY SEMICONDUCTOR SOLUTIONS CORP0 citations52
US12140750B2Nov 12, 2024
Light reflecting element and spatial light modulator
SONY SEMICONDUCTOR SOLUTIONS CORP0 citations49