Inventor
HOGAN BARRY
US2 patents
Patents
2 patentsUS5882399AMar 16, 1999
Method of forming a barrier layer which enables a consistently highly oriented crystalline structure in a metallic interconnect
APPLIED MATERIALS INC52 citations90
US6156647ADec 5, 2000
Barrier layer structure which prevents migration of silicon into an adjacent metallic layer and the method of fabrication of the barrier layer
APPLIED MATERIALS INC23 citations86