Inventor
FUKASAWA YUKIHIKO
JP4 patents
⚠️ This page may combine multiple inventors who share the name “FUKASAWA YUKIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS6111421AAug 29, 2000
Probe method and apparatus for inspecting an object
TOKYO ELECTRON LTD114 citations95
US6963208B2Nov 8, 2005
Probe device, probe card channel information creation program, and probe card information creation device
TOKYO ELECTRON LTD10 citations72
US7969172B2Jun 28, 2011
Probing method and probing program
TOKYO ELECTRON LTD4 citations61