Inventor
YARUSSI RICHARD A
US11 patents
⚠️ This page may combine multiple inventors who share the name “YARUSSI RICHARD A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NANOMETRICS INC
9 patentsUS6522406B1Feb 18, 2003
Correcting the system polarization sensitivity of a metrology tool having a rotatable polarizer
NANOMETRICS INC119 citations97
US7115858B1Oct 3, 2006
Apparatus and method for the measurement of diffracting structures
NANOMETRICS INC55 citations95
US6181427B1Jan 30, 2001
Compact optical reflectometer system
NANOMETRICS INC70 citations95
US6320609B1Nov 20, 2001
System using a polar coordinate stage and continuous image rotation to compensate for stage rotation
NANOMETRICS INC50 citations94
US7372565B1May 13, 2008
Spectrometer measurement of diffracting structures
NANOMETRICS INC46 citations92
US6665070B1Dec 16, 2003
Alignment of a rotatable polarizer with a sample
NANOMETRICS INC40 citations92
US7295314B1Nov 13, 2007
Metrology/inspection positioning system
NANOMETRICS INC38 citations91
US7697135B1Apr 13, 2010
Scanning focal length metrology
NANOMETRICS INC6 citations73
US7289215B2Oct 30, 2007
Image control in a metrology/inspection positioning system
NANOMETRICS INC7 citations72