Inventor
PENG HSIAO-HUA
TW3 patents
Patents
3 patentsUS11062886B2Jul 13, 2021
Apparatus and method for controlling wafer uniformity
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations66
US12142497B2Nov 12, 2024
Heating platform, thermal treatment and manufacturing method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations55
US11107708B2Aug 31, 2021
Heating platform, thermal treatment and manufacturing method
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations55