Inventor
CHEN HANN-RU
TW5 patents
⚠️ This page may combine multiple inventors who share the name “CHEN HANN-RU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
4 patentsUS9639774B2May 2, 2017
Method for determining applicabilty of a processing device, a processing path and a processing pattern
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations68
US11062886B2Jul 13, 2021
Apparatus and method for controlling wafer uniformity
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations66
US12142497B2Nov 12, 2024
Heating platform, thermal treatment and manufacturing method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations55
US11107708B2Aug 31, 2021
Heating platform, thermal treatment and manufacturing method
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations55