Inventor
CARPI ENIO L
US4 patents
⚠️ This page may combine multiple inventors who share the name “CARPI ENIO L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
3 patentsUS7150946B2Dec 19, 2006
Method for the repair of defects in photolithographic masks for patterning semiconductor wafers
INFINEON TECHNOLOGIES AG6 citations57
US6801314B2Oct 5, 2004
Alignment system and method using bright spot and box structure
INFINEON TECHNOLOGIES AG2 citations57
US6784070B2Aug 31, 2004
Intra-cell mask alignment for improved overlay
INFINEON TECHNOLOGIES AG1 citations46