Inventor
LIEGL BERNHARD
US3 patents
Patents
3 patentsUS7141338B2Nov 28, 2006
Sub-resolution sized assist features
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US6801314B2Oct 5, 2004
Alignment system and method using bright spot and box structure
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US6784070B2Aug 31, 2004
Intra-cell mask alignment for improved overlay
INFINEON TECHNOLOGIES AG1 citations46