Inventor
LEE WON-SEONG
KR9 patents
Patents
9 patentsUS6326282B1Dec 4, 2001
Method of forming trench isolation in a semiconductor device and structure formed thereby
SAMSUNG ELECTRONICS CO LTD105 citations97
US6399476B2Jun 4, 2002
Multilayer passivation process for forming air gaps within a dielectric between interconnections
SAMSUNG ELECTRONICS CO LTD66 citations94
US6607983B1Aug 19, 2003
Method of processing a defect source at a wafer edge region in a semiconductor manufacturing
SAMSUNG ELECTRONICS CO LTD44 citations90
US5858833AJan 12, 1999
Methods for manufacturing integrated circuit memory devices including trench buried bit lines
SAMSUNG ELECTRONICS CO LTD28 citations89
US6844240B2Jan 18, 2005
Semiconductor device having trench isolation
SAMSUNG ELECTRONICS CO LTD6 citations73
US6121146ASep 19, 2000
Method for forming contact plugs of a semiconductor device
SAMSUNG ELECTRONICS CO LTD10 citations73
US5728627AMar 17, 1998
Methods of forming planarized conductive interconnects for integrated circuits
SAMSUNG ELECTRONICS CO LTD9 citations72
US7517762B2Apr 14, 2009
Semiconductor device capable of preventing moisture-absorption of fuse area thereof and method for manufacturing the fuse area
SAMSUNG ELECTRONICS CO LTD4 citations62
US6913953B2Jul 5, 2005
Semiconductor device capable of preventing moisture absorption of fuse area thereof and method for manufacturing the fuse area
SAMSUNG ELECTRONICS CO LTD0 citations51