Inventor
NEWTON KENNETH J
US6 patents
Patents
6 patentsUS6455411B1Sep 24, 2002
Defect and etch rate control in trench etch for dual damascene patterning of low-k dielectrics
TEXAS INSTRUMENTS INC86 citations96
US6720247B2Apr 13, 2004
Pre-pattern surface modification for low-k dielectrics using A H2 plasma
TEXAS INSTRUMENTS INC48 citations92
US6797633B2Sep 28, 2004
In-situ plasma ash/treatment after via etch of low-k films for poison-free dual damascene trench patterning
TEXAS INSTRUMENTS INC27 citations90
US6774031B2Aug 10, 2004
Method of forming dual-damascene structure
TEXAS INSTRUMENTS INC14 citations83
US6872665B1Mar 29, 2005
Process flow for dual damescene interconnect structures
TEXAS INSTRUMENTS INC3 citations58
US6861348B2Mar 1, 2005
Pre-pattern surface modification of low-k dielectrics
TEXAS INSTRUMENTS INC1 citations51