Inventor
TOH SIEW LOK
SG4 patents
⚠️ This page may combine multiple inventors who share the name “TOH SIEW LOK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CHARTERED SEMICONDUCTOR MFG
3 patentsUS6797605B2Sep 28, 2004
Method to improve adhesion of dielectric films in damascene interconnects
CHARTERED SEMICONDUCTOR MFG17 citations89
US6513374B2Feb 4, 2003
Apparatus to quantify the adhesion of film
CHARTERED SEMICONDUCTOR MFG9 citations69
US7078333B2Jul 18, 2006
Method to improve adhesion of dielectric films in damascene interconnects
CHARTERED SEMICONDUCTOR MFG4 citations59