Inventor
TAY TONG EARN
SG3 patents
Patents
3 patentsUS6797605B2Sep 28, 2004
Method to improve adhesion of dielectric films in damascene interconnects
CHARTERED SEMICONDUCTOR MFG17 citations89
US6513374B2Feb 4, 2003
Apparatus to quantify the adhesion of film
CHARTERED SEMICONDUCTOR MFG9 citations69
US7078333B2Jul 18, 2006
Method to improve adhesion of dielectric films in damascene interconnects
CHARTERED SEMICONDUCTOR MFG4 citations59